@INPROCEEDINGS{7348428,
author={M. {Zia} and C. {Zhang} and P. {Thadesar} and T. {Hookway} and T. {Chi} and J. {Gonzalez} and T. {McDevitt} and H. {Wang} and M. S. {Bakir}},
booktitle={2015 IEEE Biomedical Circuits and Systems Conference (BioCAS)},
title={Fabrication of and cell growth on ‘silicon membranes’ with high density TSVs for bio-sensing applications},
year={2015},
volume={},
number={},
pages={1-4},
keywords={biological tissues;biosensors;cellular biophysics;elemental semiconductors;membranes;molecular electronics;silicon;surface roughness;three-dimensional integrated circuits;high pixel density membranes;sensing electrodes;cell growth;surface roughness;cell adhesion;surface variations;cell imaging;interface material;;selection process;standard Tissue Culture Polystyrene surface;silicon based surfaces;Cell growth;Cell attachment;image mapping;high pixel density;high-throughput bio-sensing;sensing electronics;live cells;interface layer;silicon membrane;biosensing applications;high density TSV;silicon membranes;cell growth;Silicon;Sensors;Electrodes;Through-silicon vias;Biomembranes;CMOS integrated circuits;Rough surfaces;Cell growth;silicon membranes;bio-sensing platform;TSVs;system integration},
doi={10.1109/BioCAS.2015.7348428},
ISSN={null},
month={Oct},}