@inproceedings{yeon2017microfabrication, title={Microfabrication, assembly, and hermetic packaging of mm-sized free-floating neural probes}, author={Yeon, Pyungwoo and Gonzalez, Joe L and Zia, Muneeb and Rajan, S Kochupurackal and May, Gary S and Bakir, Muhannad S and Ghovanloo, Maysam}, booktitle={2017 IEEE Biomedical Circuits and Systems Conference (BioCAS)}, pages={1--4}, year={2017}, organization={IEEE} }