@ARTICLE{9528373, author={Gonzalez, Joe L. and Rajan, Sreejith Kochupurackal and Brescia, Jonathan R. and Bakir, Muhannad S.}, journal={IEEE Transactions on Components, Packaging and Manufacturing Technology}, title={A Substrate-Agnostic, Submicrometer PSAS-to-PSAS Self-Alignment Technology for Heterogeneous Integration}, year={2021}, volume={11}, number={12}, pages={2061-2068}, doi={10.1109/TCPMT.2021.3109913}}