@article{wan2016rcwa,
  title={RCWA-EIS method for interlayer grating coupling},
  author={Wan, Congshan and Gaylord, Thomas K and Bakir, Muhannad S},
  journal={Applied optics},
  volume={55},
  number={22},
  pages={5900--5908},
  year={2016},
  publisher={Optical Society of America}
}