@INPROCEEDINGS{8614503,
author={M. {Zia} and B. {Chung} and S. J. {Sober} and M. S. {Bakir}},
booktitle={2018 IEEE International Electron Devices Meeting (IEDM)},
title={Fabrication and Characterization of 3D Multi-Electrode Array on Flexible Substrate for In Vivo EMG Recording from Expiratory Muscle of Songbird},
year={2018},
volume={},
number={},
pages={29.4.1-29.4.4},
keywords={biomedical electrodes;electrodes;electromyography;microelectrodes;muscle;neurophysiology;expiratory muscle;in vivo EMG recording;signal-to-noise electromyogram recordings;three-dimensional multielectrode arrays;flexible substrate;3D multielectrode array;SNR measurements;fabricated 3D MEA devices;biocompatibility;photoresist reflow process;Three-dimensional displays;Electromyography;Signal to noise ratio;Muscles;Electrodes;Two dimensional displays;Arrays},
doi={10.1109/IEDM.2018.8614503},
ISSN={0163-1918},
month={Dec},}